P-type macroporous silicon for two-dimensional photonic crystals was discussed. Electrochemical etching was used on p-type doped silicon. Results showed that current density, the HF concentration and duration of etching effect the macroporous structures of p-type silicon.
P-type macroporous silicon for two-dimensional photonic crystals
GALLI, MATTEO;PATRINI, MADDALENA;MARABELLI, FRANCO
2002-01-01
Abstract
P-type macroporous silicon for two-dimensional photonic crystals was discussed. Electrochemical etching was used on p-type doped silicon. Results showed that current density, the HF concentration and duration of etching effect the macroporous structures of p-type silicon.File in questo prodotto:
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