We use an array of polymer microlenses spatially matched to an array of SPADs (Single Photon Avalanche Detector) to mitigate the loss of sensitivity due to the area fill-factor. The lens array is fabricated by polymer casting in a photoresist replica mold. We report results about reproducibility of concentration factor and back focal length within an individual 32x32 array. At a C factor of 35 and a focal length F=40 μm, the spread of concentration is < 6%, and the spread of BFL is <0.5 μm.
Uniformity of Concentration Factor and BFL in Microlens Array for Image Detectors Applications
MARTINI, GIUSEPPE;RANDONE, ENRICO MARIA;FATHI, MOHAMMAD TAGHI;DONATI, SILVANO
2009-01-01
Abstract
We use an array of polymer microlenses spatially matched to an array of SPADs (Single Photon Avalanche Detector) to mitigate the loss of sensitivity due to the area fill-factor. The lens array is fabricated by polymer casting in a photoresist replica mold. We report results about reproducibility of concentration factor and back focal length within an individual 32x32 array. At a C factor of 35 and a focal length F=40 μm, the spread of concentration is < 6%, and the spread of BFL is <0.5 μm.File in questo prodotto:
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