By using surface (High Resolution Electron Energy Loss Spectroscopy) and bulk (Infrared Spectrometry) sensitive techniques, the lcnowledge of hydrogen and sp3hp2 depth profiles is achieved. It is shown that diamond-like films have a hydrogen enrichment near the surface, while their sp3/sp2 value does not change with depth. The shapes of the real and imaginary parts of the dielectric constant, obtained by means of Spectral Ellipsometry, are discussed based on the sp2 clusters model.
Bulk and surface in a-C:H films
GUIZZETTI, GIORGIO;PATRINI, MADDALENA;
1996-01-01
Abstract
By using surface (High Resolution Electron Energy Loss Spectroscopy) and bulk (Infrared Spectrometry) sensitive techniques, the lcnowledge of hydrogen and sp3hp2 depth profiles is achieved. It is shown that diamond-like films have a hydrogen enrichment near the surface, while their sp3/sp2 value does not change with depth. The shapes of the real and imaginary parts of the dielectric constant, obtained by means of Spectral Ellipsometry, are discussed based on the sp2 clusters model.File in questo prodotto:
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