Experimental and theoretical investigations of photonic crystal PhC structures in silicon nitride/silicon dioxide Si3N4 /SiO2 vertical waveguiding geometry are reported. One-dimensional patterns, either periodic or with cavity layers, are carved onto the channel waveguides by using focused ion beam lithography. Broadband transmittance spectroscopy in the visible and near-infrared frequency ranges is employed to show photonic band gap behavior up to the fourth order. For structures with a cavity layer, resonant peaks appear in transmittance spectra within the photonic gaps, in agreement with theory. The results show the interest of Si3N4 /SiO2-based PhC waveguides for photonics applications from the infrared up to the visible range.
Wide-band transmittance of one-dimensional photonic crystals carved in Si3N4/SiO2 channel waveguides
GERACE, DARIO;GALLI, MATTEO;BAJONI, DANIELE;GUIZZETTI, GIORGIO;ANDREANI, LUCIO;
2005-01-01
Abstract
Experimental and theoretical investigations of photonic crystal PhC structures in silicon nitride/silicon dioxide Si3N4 /SiO2 vertical waveguiding geometry are reported. One-dimensional patterns, either periodic or with cavity layers, are carved onto the channel waveguides by using focused ion beam lithography. Broadband transmittance spectroscopy in the visible and near-infrared frequency ranges is employed to show photonic band gap behavior up to the fourth order. For structures with a cavity layer, resonant peaks appear in transmittance spectra within the photonic gaps, in agreement with theory. The results show the interest of Si3N4 /SiO2-based PhC waveguides for photonics applications from the infrared up to the visible range.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
