We report on results of the fabrication and optical measurements of silicon on insulator (SOI) nanostructures designed for photonic applications. Patterning has been done by electron beam lithography and reactive ion etching with an SF and CHF gas mixture. Both one dimensional (1D) and two dimensional (2D) photonic 6 3 lattices were studied by measuring dispersion curves above the light cone. Lateral Fabry-Perot resonators were also fabricated in a waveguide geometry, showing strong dependence of the transmission intensity as a function of the silicon filling factor and the number of air gaps in the Bragg-like mirrors.
Fabrication and optical measurements of silicon on insulator photonic nanostructures
PATRINI, MADDALENA;GALLI, MATTEO;MARABELLI, FRANCO;AGIO, MARIO;ANDREANI, LUCIO;
2002-01-01
Abstract
We report on results of the fabrication and optical measurements of silicon on insulator (SOI) nanostructures designed for photonic applications. Patterning has been done by electron beam lithography and reactive ion etching with an SF and CHF gas mixture. Both one dimensional (1D) and two dimensional (2D) photonic 6 3 lattices were studied by measuring dispersion curves above the light cone. Lateral Fabry-Perot resonators were also fabricated in a waveguide geometry, showing strong dependence of the transmission intensity as a function of the silicon filling factor and the number of air gaps in the Bragg-like mirrors.File in questo prodotto:
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