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Characterization of silicon microstructures by feedback interferometry.

ANNOVAZZI LODI, VALERIO;MERLO, SABINA GIOVANNA;NORGIA, MICHELE
2002-01-01
2002
The Electrical and Electronics Engineering category covers resources concerned with applications of electricity, generally those involving current flow through conductors, as in motors and generators. This category also covers the examination of the conduction of electricity through gases or a vacuum as well as through semiconducting materials. Topics include image and signal processing, electromagnetics, electronic components and materials, microwave technology, and microelectronics.
JOURNAL OF OPTICS. A, PURE AND APPLIED OPTICS
sì
WOS:000180072200033
2-s2.0-0036864499
Sì, ma tipo non specificato
Inglese
Internazionale
STAMPA
4
6
S311
S317
Tematica Ex SIR: Sensori e attuatori MEMS (Classif. Ex SIR:Articoli su riviste ISI )
MEMS; Optical measurements
3
info:eu-repo/semantics/article
262
ANNOVAZZI LODI, Valerio; Merlo, SABINA GIOVANNA; Norgia, Michele
1 Contributo su Rivista::1.1 Articolo in rivista
none
1.1 Articolo in rivista
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11571/132742
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