Abstract—This paper describes and compares three optical methods for performing spot measurements on micromachined mirrors, designed for photonic switching in fiberoptic networks. For static characterization, two spot-position detection systems, one based on a vidicon camera and the other based on a bidimensional silicon position sensitive detector (PSD), are illustrated, tested, and compared. Moreover, the dynamic behavior has been monitored with the PSD-based detection arrangement and with a semiconductor laser feedback interferometer. Advantages and drawbacks of these methods are highlighted. Testing is reported on torsional, silicon micromachined mirrors, with a single degree of freedom. High dc voltage for static measurements, and sinusoidal or white-noise or step excitation for dynamic characterization, have been used for mirror driving.
Spot Optical Measurements on Micromachined Mirrors for Photonic Switching
ANNOVAZZI LODI, VALERIO;BENEDETTI, MAURO;MERLO, SABINA GIOVANNA;NORGIA, MICHELE
2004-01-01
Abstract
Abstract—This paper describes and compares three optical methods for performing spot measurements on micromachined mirrors, designed for photonic switching in fiberoptic networks. For static characterization, two spot-position detection systems, one based on a vidicon camera and the other based on a bidimensional silicon position sensitive detector (PSD), are illustrated, tested, and compared. Moreover, the dynamic behavior has been monitored with the PSD-based detection arrangement and with a semiconductor laser feedback interferometer. Advantages and drawbacks of these methods are highlighted. Testing is reported on torsional, silicon micromachined mirrors, with a single degree of freedom. High dc voltage for static measurements, and sinusoidal or white-noise or step excitation for dynamic characterization, have been used for mirror driving.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
