Spot Optical Measurements on Micromachined Mirrors for Photonic Switching

Abstract—This paper describes and compares three optical methods for performing spot measurements on micromachined mirrors, designed for photonic switching in fiberoptic networks. For static characterization, two spot-position detection systems, one based on a vidicon camera and the other based on a bidimensional silicon position sensitive detector (PSD), are illustrated, tested, and compared. Moreover, the dynamic behavior has been monitored with the PSD-based detection arrangement and with a semiconductor laser feedback interferometer. Advantages and drawbacks of these methods are highlighted. Testing is reported on torsional, silicon micromachined mirrors, with a single degree of freedom. High dc voltage for static measurements, and sinusoidal or white-noise or step excitation for dynamic characterization, have been used for mirror driving.