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a-Si1-xNx:H thin films grown by PECVD in a wide compositional range were characterized by spectroscopic ellipsometry and Mach– Zehnder interferometry. Taking advantage from their optical properties, the alloys were fruitfully applied for stratified structures such as distributed Bragg reflectors, conventional and double resonance optical microcavities.

Amorphous silicon nitride: a suitable alloy for optical multilayered structures

GALLI, MATTEO;LISCIDINI, MARCO;ANDREANI, LUCIO;
2006-01-01

Abstract

a-Si1-xNx:H thin films grown by PECVD in a wide compositional range were characterized by spectroscopic ellipsometry and Mach– Zehnder interferometry. Taking advantage from their optical properties, the alloys were fruitfully applied for stratified structures such as distributed Bragg reflectors, conventional and double resonance optical microcavities.
2006
Applied Physics/Condensed Matter/Materials Science encompasses the resources of three related disciplines: Applied Physics, Condensed Matter Physics, and Materials Science. The applied physics resources are concerned with the applications of topics in condensed matter as well as optics, vacuum science, lasers, electronics, cryogenics, magnets and magnetism, acoustical physics and mechanics. The condensed matter physics resources are concerned with the study of the structure and the thermal, mechanical, electrical, magnetic and optical properties of condensed matter. They include superconductivity, surfaces, interfaces, thin films, dielectrics, ferroelectrics and semiconductors. The materials science resources are concerned with the physics and chemistry of materials and include ceramics, composites, alloys, metals and metallurgy, nanotechnology, nuclear materials, adhesion and adhesives. Resources dealing with polymeric materials are listed in the Organic Chemistry/Polymer Science category.
JOURNAL OF NON-CRYSTALLINE SOLIDS
sì
WOS:000238782900105
2-s2.0-33744517006
Esperti anonimi
Inglese
Internazionale
STAMPA
352
1294
1297
4
Silicon Nitrides; Thin films; Interferometry
11
info:eu-repo/semantics/article
262
Ricciardi, C.; Ballarini, V.; Galli, Matteo; Liscidini, Marco; Andreani, Lucio; Losurdo, M.; Bruno, G.; Lettieri, S.; Gesuele, F.; Maddalena, P.; Gior...espandi
1 Contributo su Rivista::1.1 Articolo in rivista
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1.1 Articolo in rivista
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11571/138112
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