Electrostatic micromotors were the first MEMS which had been designed and prototyped exploiting Silicon integrated technology.

Numerical case studies: Forward problems

Di Barba P.;Mognaschi M. E.
2020-01-01

Abstract

Electrostatic micromotors were the first MEMS which had been designed and prototyped exploiting Silicon integrated technology.
2020
978-3-030-21495-1
978-3-030-21496-8
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11571/1440475
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