Electrostatic micromotors were the first MEMS which had been designed and prototyped exploiting Silicon integrated technology.
Numerical case studies: Forward problems
Di Barba P.;Mognaschi M. E.
2020-01-01
Abstract
Electrostatic micromotors were the first MEMS which had been designed and prototyped exploiting Silicon integrated technology.File in questo prodotto:
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