In this paper, we prove the existence and uniqueness of solutions for a nonlocal, fourthorder integro-differential equation that models electrostatic MEMS with parallel metallic plates by exploiting a well-known implicit function theorem on the topological space framework. As the diameter of the domain is fairly small (similar to the length of the device wafer, which is comparable to the distance between the plates), the fringing field phenomenon can arise. Therefore, based on the Pelesko–Driscoll theory, a term for the fringing field has been considered. The nonlocal model obtained admits solutions, making these devices attractive for industrial applications whose intended uses require reduced external voltages.
Electrostatic-elastic MEMS with fringing field: A problem of global existence
Di Barba P.;
2022-01-01
Abstract
In this paper, we prove the existence and uniqueness of solutions for a nonlocal, fourthorder integro-differential equation that models electrostatic MEMS with parallel metallic plates by exploiting a well-known implicit function theorem on the topological space framework. As the diameter of the domain is fairly small (similar to the length of the device wafer, which is comparable to the distance between the plates), the fringing field phenomenon can arise. Therefore, based on the Pelesko–Driscoll theory, a term for the fringing field has been considered. The nonlocal model obtained admits solutions, making these devices attractive for industrial applications whose intended uses require reduced external voltages.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
