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Effects of the deposition parameters on the growth of ultra-thin and thin SiO2 films prepared by RF magnetron sputtering

MUSTARELLI, PIERCARLO;MARABELLI, FRANCO;QUARTARONE, ELIANA;
2007-01-01
2007
Applied Physics/Condensed Matter/Materials Science encompasses the resources of three related disciplines: Applied Physics, Condensed Matter Physics, and Materials Science. The applied physics resources are concerned with the applications of topics in condensed matter as well as optics, vacuum science, lasers, electronics, cryogenics, magnets and magnetism, acoustical physics and mechanics. The condensed matter physics resources are concerned with the study of the structure and the thermal, mechanical, electrical, magnetic and optical properties of condensed matter. They include superconductivity, surfaces, interfaces, thin films, dielectrics, ferroelectrics and semiconductors. The materials science resources are concerned with the physics and chemistry of materials and include ceramics, composites, alloys, metals and metallurgy, nanotechnology, nuclear materials, adhesion and adhesives. Resources dealing with polymeric materials are listed in the Organic Chemistry/Polymer Science category.
sì
Sì, ma tipo non specificato
Inglese
Internazionale
STAMPA
25
485
Tematica Ex SIR: Composti intermetallici a forte correlazione elettronica (Classif. Ex SIR:Articoli su riviste ISI )
SiO2; ultra thin films; rf sputtering
5
info:eu-repo/semantics/article
262
Mustarelli, Piercarlo; Marabelli, Franco; Quartarone, Eliana; M. P., Infante Garcia; E., Bontempi
1 Contributo su Rivista::1.1 Articolo in rivista
none
1.1 Articolo in rivista
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11571/32740
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