In this paper the technique of infrared angular spectroscopy applied to the characterization of epitaxial layers of n-type silicon grown on N+ or P+ substrates is illustrated. Some results are reported and discussed concerning films having a free-carrier concentration ranging from 1014 cm−3 to 1017 cm−3 and thickness of the order of 10 μm. A significant comparison with results obtained by other techniques (four-point probe, spreading resistance, C−V plots, etc.) is performed and a few simple conclusions are drawn.

Infrared angular spectroscopy characterization of epitaxial layers of n-type silicon grown on N+ or P+ substrates

GEDDO, MARIO;
1989

Abstract

In this paper the technique of infrared angular spectroscopy applied to the characterization of epitaxial layers of n-type silicon grown on N+ or P+ substrates is illustrated. Some results are reported and discussed concerning films having a free-carrier concentration ranging from 1014 cm−3 to 1017 cm−3 and thickness of the order of 10 μm. A significant comparison with results obtained by other techniques (four-point probe, spreading resistance, C−V plots, etc.) is performed and a few simple conclusions are drawn.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11571/460499
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