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Optical analysis of oxygen in epitaxial silicon

GEDDO, MARIO;
1992-01-01
1992
Crucial issues in semiconductor materials and processing technologies
S. Coffa
The Physics category includes resources of a broad, general nature that contain materials from all areas of physics, The category also includes resources specifically concerned with the following physics sub-fields: mathematical physics, particle and nuclear physics, physics of fluids and plasmas, quantum physics, and theoretical physics.
Nessuno
Inglese
Internazionale
STAMPA
119
127
0792320034
2 Contributo in Volume::2.1 Contributo in volume (Capitolo o Saggio)
2
268
none
Geddo, Mario; B., Pivac
info:eu-repo/semantics/bookPart
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11571/468971
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