We demonstrate a back end of line compatible SiN based material with tunable refractive index enabling low optical loss, high non-linear Kerr response, low index photonic crystals, high efficiency couplers, low loss waveguides and temperature tolerant MUX for DWDM.

Tunable index back end of line platform for enhanced integrated photonics

Lacava C.;
2017-01-01

Abstract

We demonstrate a back end of line compatible SiN based material with tunable refractive index enabling low optical loss, high non-linear Kerr response, low index photonic crystals, high efficiency couplers, low loss waveguides and temperature tolerant MUX for DWDM.
2017
978-1-5090-6568-4
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11571/1344958
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