By combining tabletop 13.5nm high-harmonic EUV beams with novel ptychography reconstruction algorithms, we demonstrate diffraction-limit high-NA and sub-wavelength resolution imaging at EUV wavelengths for the first time, representing a record resolution for full-field lightbased microscopy.

First demonstration of sub-wavelength imaging at short wavelengths

Bevis C.;Mancini G. F.
Supervision
;
2017-01-01

Abstract

By combining tabletop 13.5nm high-harmonic EUV beams with novel ptychography reconstruction algorithms, we demonstrate diffraction-limit high-NA and sub-wavelength resolution imaging at EUV wavelengths for the first time, representing a record resolution for full-field lightbased microscopy.
2017
978-1-943580-33-0
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11571/1477827
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 0
  • ???jsp.display-item.citation.isi??? ND
social impact