By combining tabletop 13.5nm high-harmonic EUV beams with novel ptychography reconstruction algorithms, we demonstrate diffraction-limit high-NA and sub-wavelength resolution imaging at EUV wavelengths for the first time, representing a record resolution for full-field lightbased microscopy.
First demonstration of sub-wavelength imaging at short wavelengths
Bevis C.;Mancini G. F.Supervision
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2017-01-01
Abstract
By combining tabletop 13.5nm high-harmonic EUV beams with novel ptychography reconstruction algorithms, we demonstrate diffraction-limit high-NA and sub-wavelength resolution imaging at EUV wavelengths for the first time, representing a record resolution for full-field lightbased microscopy.File in questo prodotto:
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