We demonstrate the first general, sub-wavelength EUV diffraction imaging results using a 13.5nm high-harmonic light source. A novel modulus enforced probe technique is developed and implemented allowing quantitative imaging of nearly periodic objects.
Sub-wavelength 12.6nm resolution using a tabletop high harmonic coherent diffractive microscope
Bevis C.;Mancini G. F.Supervision
;
2017-01-01
Abstract
We demonstrate the first general, sub-wavelength EUV diffraction imaging results using a 13.5nm high-harmonic light source. A novel modulus enforced probe technique is developed and implemented allowing quantitative imaging of nearly periodic objects.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.