We demonstrate the first general, sub-wavelength EUV diffraction imaging results using a 13.5nm high-harmonic light source. A novel modulus enforced probe technique is developed and implemented allowing quantitative imaging of nearly periodic objects.
Sub-wavelength 12.6nm resolution using a tabletop high harmonic coherent diffractive microscope
Bevis C.;Mancini G. F.Supervision
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2017-01-01
Abstract
We demonstrate the first general, sub-wavelength EUV diffraction imaging results using a 13.5nm high-harmonic light source. A novel modulus enforced probe technique is developed and implemented allowing quantitative imaging of nearly periodic objects.File in questo prodotto:
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