We demonstrate the first general, sub-wavelength EUV diffraction imaging results using a 13.5nm high-harmonic light source. A novel modulus enforced probe technique is developed and implemented allowing quantitative imaging of nearly periodic objects.

Sub-wavelength 12.6nm resolution using a tabletop high harmonic coherent diffractive microscope

Bevis C.;Mancini G. F.
Supervision
;
2017-01-01

Abstract

We demonstrate the first general, sub-wavelength EUV diffraction imaging results using a 13.5nm high-harmonic light source. A novel modulus enforced probe technique is developed and implemented allowing quantitative imaging of nearly periodic objects.
2017
978-1-943580-29-3
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11571/1477828
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