We use reflection-mode ptychography CDI with HHG illumination to image copper nanostructures buried beneath 100nm of aluminum. Our technique yields absolute reflectivity images, allowing non-destructive detection of diffusion at the Al-Cu boundary, confirmed by Auger-Electron-Spectroscopy.
Coherent diffraction imaging of buried nanostructures in a reflection geometry with extreme ultraviolet light
Mancini G. F.Membro del Collaboration Group
;Bevis C. S.;
2016-01-01
Abstract
We use reflection-mode ptychography CDI with HHG illumination to image copper nanostructures buried beneath 100nm of aluminum. Our technique yields absolute reflectivity images, allowing non-destructive detection of diffusion at the Al-Cu boundary, confirmed by Auger-Electron-Spectroscopy.File in questo prodotto:
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