We demonstrate a record near-wavelength limited 17.5nm spatial resolution for EUV imaging using ptychographic coherent diffractive imaging with illumination at 13.5nm from a high-harmonic light source.
Ptychographic imaging with 17.5nm spatial resolution employing high harmonic light at 13.5nm
Mancini G. F.Supervision
;Bevis C.;
2016-01-01
Abstract
We demonstrate a record near-wavelength limited 17.5nm spatial resolution for EUV imaging using ptychographic coherent diffractive imaging with illumination at 13.5nm from a high-harmonic light source.File in questo prodotto:
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