We demonstrate imaging of optically opaque nanostructures buried beneath a thick layer of aluminum using a tabletop extreme ultraviolet source. Our non-destructive technique uncovers interfacial diffusion and oxidation between layers, validated using destructive techniques.© OSA 2016.
Quantitative chemically-specific coherent diffractive imaging of reactions and diffusion at buried interfaces using a tabletop euv nanoscope
Mancini G. F.Membro del Collaboration Group
;Bevis C. S.;
2016-01-01
Abstract
We demonstrate imaging of optically opaque nanostructures buried beneath a thick layer of aluminum using a tabletop extreme ultraviolet source. Our non-destructive technique uncovers interfacial diffusion and oxidation between layers, validated using destructive techniques.© OSA 2016.File in questo prodotto:
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