We demonstrate a record sub-wavelength 12.6nm spatial resolution for EUV imaging using 13.5nm illumination from a high-harmonic light source. Modulus enforced probe ptychographic coherent diffractive imaging allows for large-field quantitative imaging of nearperiodic objects.
Sub-Wavelength EUV imaging with 12.6nm spatial resolution employing 13.5nm high harmonic beams
Mancini G. F.
Supervision
;Bevis C.;
2016-01-01
Abstract
We demonstrate a record sub-wavelength 12.6nm spatial resolution for EUV imaging using 13.5nm illumination from a high-harmonic light source. Modulus enforced probe ptychographic coherent diffractive imaging allows for large-field quantitative imaging of nearperiodic objects.File in questo prodotto:
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