We demonstrate non-invasive, high-resolution non-destructive reflection mode imaging of nanostructures buried beneath 100 nm of visibly opaque aluminum using ptychographic coherent diffractive imaging with 29.1 nm extreme ultraviolet light produced by tabletop high harmonic source. © OSA 2016.
Tabletop extreme ultraviolet reflection mode coherent diffractive imaging of buried structures
Mancini G. F.
Membro del Collaboration Group
;Bevis C.;
2016-01-01
Abstract
We demonstrate non-invasive, high-resolution non-destructive reflection mode imaging of nanostructures buried beneath 100 nm of visibly opaque aluminum using ptychographic coherent diffractive imaging with 29.1 nm extreme ultraviolet light produced by tabletop high harmonic source. © OSA 2016.File in questo prodotto:
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