We present an extension to ptychography that allows simultaneous deconvolution of multiple, spatially separate, illuminating probes. This enables an increased field of view and hence, an increase in imaging throughput, without increased exposure times. This technique can be used for any non-interfering probes: demonstrated with multiple wavelengths and orthogonal polarizations. The latter of which gives us spatially resolved polarization spectroscopy from a single scan.

Multiple beam ptychography

Bevis C.;Mancini G. F.
Membro del Collaboration Group
;
2016-01-01

Abstract

We present an extension to ptychography that allows simultaneous deconvolution of multiple, spatially separate, illuminating probes. This enables an increased field of view and hence, an increase in imaging throughput, without increased exposure times. This technique can be used for any non-interfering probes: demonstrated with multiple wavelengths and orthogonal polarizations. The latter of which gives us spatially resolved polarization spectroscopy from a single scan.
2016
Proceedings of SPIE - The International Society for Optical Engineering
Inglese
contributo
30th Conference on Metrology, Inspection, and Process Control for Microlithography
2016
usa
Internazionale
9778
97780F
SPIE
Coherent Imaging; Phase Retrieval; Ptychography
none
Karl, R.; Bevis, C.; Lopez-Rios, R.; Reichanadter, J.; Gardner, D. F.; Porter, C.; Shanblatt, E.; Tanksalvala, M.; Mancini, G. F.; Murnane, M.; Kaptey...espandi
273
info:eu-repo/semantics/conferenceObject
12
4 Contributo in Atti di Convegno (Proceeding)::4.1 Contributo in Atti di convegno
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11571/1477840
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