The main object of the paper is the implementation of two different approaches for the estimation of the modulus of elasticity and of the failure strain and stress in micro-machined structures made of epitaxial polycristalline silicon. The micro test structures are produced using a standard THELMA process as an integral part of the MEMS actuator of comb-finger type used for the direct loading of the mechanical samples.
Integrated Test Structures for the Assessment of the Mechanical Properties of Polysilicon
CARLI, FABIO;
2004-01-01
Abstract
The main object of the paper is the implementation of two different approaches for the estimation of the modulus of elasticity and of the failure strain and stress in micro-machined structures made of epitaxial polycristalline silicon. The micro test structures are produced using a standard THELMA process as an integral part of the MEMS actuator of comb-finger type used for the direct loading of the mechanical samples.File in questo prodotto:
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