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EnglishWe use an array of polymer microlenses spatially matched to an array of SPADs (Single Photon Avalanche Detector) to mitigate the loss of sensitivity due to the area fill-factor. The lens array is fabricated by polymer casting in a photoresist replica mold. We report results about reproducibility of concentration factor and back focal length within an individual 32x32 array. At a C factor of 35 and a focal length F=40 μm, the spread of concentration is < 6%, and the spread of BFL is <0.5 μm.
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| Titolo: | Uniformity of Concentration Factor and BFL in Microlens Array for Image Detectors Applications |
| Autori: | |
| Data di pubblicazione: | 2009 |
| Abstract: | We use an array of polymer microlenses spatially matched to an array of SPADs (Single Photon Avalanche Detector) to mitigate the loss of sensitivity due to the area fill-factor. The lens array is fabricated by polymer casting in a photoresist replica mold. We report results about reproducibility of concentration factor and back focal length within an individual 32x32 array. At a C factor of 35 and a focal length F=40 μm, the spread of concentration is < 6%, and the spread of BFL is <0.5 μm. |
| Handle: | http://hdl.handle.net/11571/208487 |
| ISBN: | 9781557528780 |
| Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
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