An array of polymer microlenses, made of 32x32 individual elements spaced by a 50-μm pitch, is used in connection to an array of 32x32 6-μm diameter SPADs (Single Photon Avalanche Detector), with the aim of mitigating the loss in sensitivity due to the area fill-factor. The lens array is fabricated by polymer casting in a photoresist replica mold. Results about repeatability of concentration factor and back focal length are reported. At C= 35 and a focal length F=40 μm, the spread of concentration is < 6%, and that of BFL is <0.5 μm.
Uniformity of Concentration Factor and Back Focal Length in Molded Polymer Microlens Arrays
DONATI, SILVANO;MARTINI, GIUSEPPE;RANDONE, ENRICO MARIA;FATHI, MOHAMMAD TAGHI;
2010-01-01
Abstract
An array of polymer microlenses, made of 32x32 individual elements spaced by a 50-μm pitch, is used in connection to an array of 32x32 6-μm diameter SPADs (Single Photon Avalanche Detector), with the aim of mitigating the loss in sensitivity due to the area fill-factor. The lens array is fabricated by polymer casting in a photoresist replica mold. Results about repeatability of concentration factor and back focal length are reported. At C= 35 and a focal length F=40 μm, the spread of concentration is < 6%, and that of BFL is <0.5 μm.File in questo prodotto:
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