This paper presents a toroidal inductor integrated in a standard 0.13 μm CMOS process. A very simple Π model for low frequencies is derived from 1-port and 2-port measurements, and a decent matching with general theory is observed. The coil exhibits an inductance of 1.1nH up to 20GHz (physical limit for the measurement equipment) and a quality factor approaching 10 at 15GHz. No self-resonance is observed within the measurement range.
Toroidal inductors in CMOS processes
GHEZZI, CESARE;CASTELLO, RINALDO;
2005
Abstract
This paper presents a toroidal inductor integrated in a standard 0.13 μm CMOS process. A very simple Π model for low frequencies is derived from 1-port and 2-port measurements, and a decent matching with general theory is observed. The coil exhibits an inductance of 1.1nH up to 20GHz (physical limit for the measurement equipment) and a quality factor approaching 10 at 15GHz. No self-resonance is observed within the measurement range.File in questo prodotto:
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