This paper presents a toroidal inductor integrated in a standard 0.13 μm CMOS process. A very simple Π model for low frequencies is derived from 1-port and 2-port measurements, and a decent matching with general theory is observed. The coil exhibits an inductance of 1.1nH up to 20GHz (physical limit for the measurement equipment) and a quality factor approaching 10 at 15GHz. No self-resonance is observed within the measurement range.
Toroidal inductors in CMOS processes
GHEZZI, CESARE;CASTELLO, RINALDO;
2005-01-01
Abstract
This paper presents a toroidal inductor integrated in a standard 0.13 μm CMOS process. A very simple Π model for low frequencies is derived from 1-port and 2-port measurements, and a decent matching with general theory is observed. The coil exhibits an inductance of 1.1nH up to 20GHz (physical limit for the measurement equipment) and a quality factor approaching 10 at 15GHz. No self-resonance is observed within the measurement range.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
