We investigate the electrical properties of Silicon-on-Insulator photonic crystals as a function of doping level and air filling factor. A very interesting trade-off between conductivity and optical losses in L3 cavities is also found.
Electrical and optical properties of ion implanted SOI-based photonic crystals
LO SAVIO, ROBERTO;GALLI, MATTEO;
2011-01-01
Abstract
We investigate the electrical properties of Silicon-on-Insulator photonic crystals as a function of doping level and air filling factor. A very interesting trade-off between conductivity and optical losses in L3 cavities is also found.File in questo prodotto:
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