Femtosecond laser processing is a promising alternative technique for manufacturing photonic elements such as gratings, micro-holes, and microchannels in different type of transparent materials. The effect of the irradiation of commercial Lithium Niobate substrates with a Ti-Sapphire oscillator with repetition rate 82 Mhz, energy per pulse 20 nJ, pulse duration of 130 fs and an amplified Ti-Sapphire laser system with repetition rate 1 kHz, energy per pulse 1 mJ, and pulse duration of about 130 fs are compared. The investigation of microstructural modifications induced by femtosecond irradiation through optical microscopy and micro-Raman spectroscopy is reported.
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